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Certification

Certification List

Last updated:26/8/2020

No Product Type Patent Name Country Patent Number
1 VAN Series METHOD AND APPARATUS FOR PHOTORESIST REMOVING TW 589666
2 VAN Series METHOD FOR WAFER DRYING TW I236061
3 VAN Series APPARATUS FOR WAFER RINSING AND DRYING TW I238463
4 VAN Series APPARATUS FOR WAFER RINSING AND DRYING CN ZL 2005 1 005982.6
5 VAN Series WAFER LEVEL ELECTROLESS NICKEL PLATING APPARATUS TW I418651
6 VAN Series HOLDING DEVICE AND SYSTEM THEREOF TW I469249
7 VAN Series ANTI-METAL PRECIPITATION ETCHING APPARATUS TW I501309
8 VAN Series WASHING DEVICE TW M457968
9 VAN Series WET CHEMICAL TANK CASSETTE DETECTION DEVICE TW M455976
10 VAN Series WAFER ROTARY APPARATUS TW M457285
11 VAN Series MULTI-FUNCTIONAL SUBSTRATE PROCESSING APPARATUS TW I478264
12 VAN Series WAFER CASSETTE DEVICE TW M491251
13 VAN Series WAFER CASSETTE DEVICE CN ZL 2014 2 048723.7
14 VAN Series WAFER PROCESSING APPARATUS WITH FUNCTIONS OF REMOVING WATER AND DRYING CN ZL 2015 2 0053234.2
15 VAN Series WAFER PROCESSING APPARATUS WITH FUNCTIONS OF REMOVING WATER AND DRYING AND SEMICONDUCTOR WAFER PROCESSING METHOD CN ZL 2015 1 0038219.5
16 VAN Series WAFER PROCESSING APPARATUS WITH FUNCTIONS OF REMOVING WATER AND DRYING AND SEMICONDUCTOR WAFER PROCESSING METHOD TW I620237
17 VAN Series TANK ACID CIRCULATION COOLING SYSTEM AND ACID LIQUID COOLING METHOD TW I534298
18 VAN Series LIQUID-TRANSPORTING PIPE DEVICE AND METHODS FOR SUPPLYING LIQUID AND STOPPING LIQUID SUPPLY USING THE SAME TW I552214
19 VAN Series FLUID SUPPLY PIPE DEVICE USING FOR WET BENCH TANK TW I550683
20 VAN Series WATER-SAVING DEVICE TW M517906
21 VAN Series SEMICONDUCTOR DRYING APPARATUS AND CIRCULATING AND FILTERING METHOD OF DRYING LIQUID USED FOR THE APPARATUS TW I592988
22 VAN Series SEMICONDUCTOR DRYING APPARATUS TW M533307
23 VAN Series SEMICONDUCTOR DRYING APPARATUS CN ZL 2016 2 0770699.4
24 VAN Series CASSETTE TURNOVER MECHANISM TW M532094
25 VAN Series CASSETTE TURNOVER MECHANISM CN ZL 2016 2 0970499.3
26 VAN Series PROCESSING LIQUID DELIVERY SYSTEM TW M541640
27 VAN Series PROCESSING LIQUID DELIVERY SYSTEM CN ZL 2016 2 1281040.9
28 VAN Series RETRACTABLE CASSETTE CHUCK TW M541114
29 VAN Series TELESCOPIC CASSETTE FIXTURE CN ZL 2017 2 0013190.X
30 VAN Series WET-CHEMICAL TREATMENT EQUIPMENT CN ZL 2017 2 0139360.9
31 VAN Series WET-CHEMICAL TREATMENT EQUIPMENT TW M543459
32 VAN Series BATCH SUBSTRATE DRYING EQUIPMENT AND SUBSTRATE DRYING AIR BLADE DEVICE THEREOF TW I694872
33 VAN Series BATCH SUBSTRATE DRYING EQUIPMENT AND SUBSTRATE DRYING AIR BLADE DEVICE THEREOF CN ZL 2019 2 0091948.0
34 VAN Series BATCH SUBSTRATE WET TREATMENT DEVICE AND BATCH SUBSTRATE WET TREATMENT METHOD TW I690991
35 VAN Series BATCH BASE PLATE WET PROCESSING UNIT CN ZL 2019 2 0111710.4
36 VAN Series CASSETTE ROTATING APPARATUS AND CASSETTE TW M584541
37 VAN Series CARTRIDGE ROTATING APPARATUS AND CARTRIDGE CN ZL 2019 2 1048377.9
38 VAN Series WAFER CLEANING AND DRYING DEVICE CN ZL 2019 2 1920014.X
39 VAN Series WAFER CLEANING AND DRYING DEVICE TW M589363
40 VAN Series CHEMICAL AGENT QUANTITATIVE DEVICE TW M592958
41 UFO Series PUDDLE ETCHING METHOD OF THIN FILM BY USING SPIN-PROCESSOR US US 6,793,836 B2
42 UFO Series MECHANICAL STRUCTURE OF APPARATUS FOR CLAMPING WAFER WITH MULTIPLE GROUPS OF CLAMPING FINGERS TW I295831
43 UFO Series SPIN CLEANING AND ETCHING WET PROCESSOR WITH DI BUBBLE RING DEVICE TW I383445
44 UFO Series EXHAUST APPARATUS FOR LIFTING AND LOWERING DRAIN TANK OF WET ETCHING DEVICE TW I383444
45 UFO Series EXHAUST APPARATUS FOR LIFTING AND LOWERING DRAIN TANK OF WET ETCHING DEVICE CN ZL 2012 1 0093743.9
46 UFO Series NOZZLE WITH AJUSTABLE ORIENTATION AND DIRECTION FOR TREATING THE BACKSIDE OF A WAFER TW I411025
47 UFO Series AUTOMATIC CLEANING METHOD FOR SPIN CLEANING AND ETCHING WET PROCESSOR TW I421928
48 UFO Series SINGLE WAFER WET PROCESS DEVICE WITH BERTICAL BATH IMMERSION PROCESS TW M497848
49 UFO Series DRYING METHOD OF CHIP STACKED STRUCTURE AND SYSTEM THEREOF TW I527143
50 UFO Series CLEANING APPARATUS TW M475692
51 UFO Series CLEANING METHOD OF CHIP STACKED STRUCTURE AND CLEANING APPARATUS TW I539515
52 UFO Series CLEANING METHOD OF CHIP STACKED STRUCTURE AND CLEANING APPARATUS CN ZL 2013 2 0739198.6
53 UFO Series WAFER BROKEN DETECTION TW M491942
54 UFO Series WAFER BROKEN DETECTION CN ZL 2014 2 0468448.1
55 UFO Series SUBSTRATE CLEANING DEVICE TW M504259
56 UFO Series SUBSTRATE CLEANING DEVICE CN ZL 2015 2 0285782.8
57 UFO Series LIQUID COLLECTION APPARATUS FOR SPIN ETCHER CN ZL 2015 1 0783139.2
58 UFO Series LIQUID COLLECTION APPARATUS FOR SPIN ETCHER TW M522779
59 UFO Series LIQUID COLLECTION APPARATUS FOR SPIN ETCHER TW I559990
60 UFO Series DEVICE FOR WET TREATMENT OF SINGLE WAFER TW I582886
61 UFO Series DEVICE FOR SUBSTRATE WET TREATMENT AND DEVICE FOR ETCHING AND CLEANING SINGLE WAFER COMPRISING THE SAME CN ZL 2016 1 0051632.X
62 UFO Series DEVICE FOR SUBSTRATE WET TREATMENT AND DEVICE FOR ETCHING AND CLEANING SINGLE WAFER COMPRISING THE SAME TW I580487
63 UFO Series METHOD AND DEVICE OF SUPPLYING PROCESS LIQUID TW I633939
64 UFO Series SUBSTRATE PRESSING APPARATUS CN ZL 2016 2 0517382.X
65 UFO Series SUBSTRATE PRESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME TW I601236
66 UFO Series SUBSTRATE PROCESSING APPARATUS, SPRAY HEAD CLEAING DEVICE AND METHOD FOR CLEANING SPRAY HEAD TW I640369
67 UFO Series SUBSTRATE PROCESSING APPARATUS AND SPRAY HEAD CLEANING DEVICE TW M548887
68 UFO Series SUBSTRATE BOARD TREATMENT AND SPRAY HEAD CLEANING CN ZL 2017 2 0599967.5
69 UFO Series WAFER CLEANING EQUIPMENT AND METHOD OF CONTROLLING A BRUSH OF THE WAFER CLEANING EQUIPMENT TW I645467
70 UFO Series WAFER CLEANING EQUIPMENT TW M562488
71 UFO Series WAFER CLEANING EQUIPMENT CN ZL 2017 2 1788225.3
72 UFO Series SUBSTRATE PROCESSING APPARATUS AND ROTATING STAGE THEREOF TW I685045
73 UFO Series SUBSTRATE PROCESSING APPARATUS AND ROTATING STAGE THEREOF CN ZL 2018 2 0038609.1
74 UFO Series SUBSTRATE PROCESSING APPARATUS TW I650828
75 UFO Series SUBSTRATE PROCESSING APPARATUS CN ZL 2018 2 0037879.0
76 UFO Series CLEANING DEVICE CN ZL 2018 2 0692842.1
77 UFO Series CLEANING APPARATUS AND METHOD TW I667081
78 UFO Series WAFER FIXING DEVICE, WAFER FIXING BASE AND WAFER VACUUM CHUCK TW I642138
79 UFO Series WAFER MOUNTING APPARATUS, WAFER FIXED PEDESTAL AND WAFER VACUUM SUCKER CN ZL 2018 2 0319204.5
80 UFO Series CLEANING APPARATUS AND METHOD TW I673789
81 UFO Series CLEANING APPARATUS CN ZL 2018 2 193104.3
82 UFO Series SINGLE WAFER WET PROCESSING APPARATUS TW M582233
83 UFO Series SINGLE WAFER WET PROCESSING APPARATUS CN ZL 2019 2 0637940.X
84 UFO Series SUBSTRATE TRANSFERRING APPARATUS AND SEMICONDUCTOR PROCESS MACHINE CN ZL 2019 2 0981884.1
85 UFO Series SUBSTRATE TRANSFERRING APPARATUS AND SEMICONDUCTOR PROCESS MACHINE TW M585428
86 UFO Series WAFER WET PROCESSING STATION TW M589894
87 UFO Series SUBSTRATE WET PROCESSING APPARATUS AND RECYCLE RING TW M596133
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