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专利证书
专利证书
| No | Product Type | Patent Name | Country | Patent Number |
|---|---|---|---|---|
| 1 | VAN Series | METHOD AND APPARATUS FOR PHOTORESIST REMOVING | TW | 589666 |
| 2 | VAN Series | METHOD FOR WAFER DRYING | TW | I236061 |
| 3 | VAN Series | APPARATUS FOR WAFER RINSING AND DRYING | TW | I238463 |
| 4 | VAN Series | APPARATUS FOR WAFER RINSING AND DRYING | CN | ZL 2005 1 005982.6 |
| 5 | VAN Series | WAFER LEVEL ELECTROLESS NICKEL PLATING APPARATUS | TW | I418651 |
| 6 | VAN Series | HOLDING DEVICE AND SYSTEM THEREOF | TW | I469249 |
| 7 | VAN Series | ANTI-METAL PRECIPITATION ETCHING APPARATUS | TW | I501309 |
| 8 | VAN Series | WASHING DEVICE | TW | M457968 |
| 9 | VAN Series | WET CHEMICAL TANK CASSETTE DETECTION DEVICE | TW | M455976 |
| 10 | VAN Series | WAFER ROTARY APPARATUS | TW | M457285 |
| 11 | VAN Series | MULTI-FUNCTIONAL SUBSTRATE PROCESSING APPARATUS | TW | I478264 |
| 12 | VAN Series | WAFER CASSETTE DEVICE | TW | M491251 |
| 13 | VAN Series | WAFER CASSETTE DEVICE | CN | ZL 2014 2 048723.7 |
| 14 | VAN Series | WAFER PROCESSING APPARATUS WITH FUNCTIONS OF REMOVING WATER AND DRYING | CN | ZL 2015 2 0053234.2 |
| 15 | VAN Series | WAFER PROCESSING APPARATUS WITH FUNCTIONS OF REMOVING WATER AND DRYING AND SEMICONDUCTOR WAFER PROCESSING METHOD |
CN | ZL 2015 1 0038219.5 |
| 16 | VAN Series | WAFER PROCESSING APPARATUS WITH FUNCTIONS OF REMOVING WATER AND DRYING AND SEMICONDUCTOR WAFER PROCESSING METHOD |
TW | I620237 |
| 17 | VAN Series | TANK ACID CIRCULATION COOLING SYSTEM AND ACID LIQUID COOLING METHOD | TW | I534298 |
| 18 | VAN Series | LIQUID-TRANSPORTING PIPE DEVICE AND METHODS FOR SUPPLYING LIQUID AND STOPPING LIQUID SUPPLY USING THE SAME |
TW | I552214 |
| 19 | VAN Series | FLUID SUPPLY PIPE DEVICE USING FOR WET BENCH TANK | TW | I550683 |
| 20 | VAN Series | WATER-SAVING DEVICE | TW | M517906 |
| 21 | VAN Series | SEMICONDUCTOR DRYING APPARATUS AND CIRCULATING AND FILTERING METHOD OF DRYING LIQUID USED FOR THE APPARATUS |
TW | I592988 |
| 22 | VAN Series | SEMICONDUCTOR DRYING APPARATUS | TW | M533307 |
| 23 | VAN Series | SEMICONDUCTOR DRYING APPARATUS | CN | ZL 2016 2 0770699.4 |
| 24 | VAN Series | CASSETTE TURNOVER MECHANISM | TW | M532094 |
| 25 | VAN Series | CASSETTE TURNOVER MECHANISM | CN | ZL 2016 2 0970499.3 |
| 26 | VAN Series | PROCESSING LIQUID DELIVERY SYSTEM | TW | M541640 |
| 27 | VAN Series | PROCESSING LIQUID DELIVERY SYSTEM | CN | ZL 2016 2 1281040.9 |
| 28 | VAN Series | RETRACTABLE CASSETTE CHUCK | TW | M541114 |
| 29 | VAN Series | TELESCOPIC CASSETTE FIXTURE | CN | ZL 2017 2 0013190.X |
| 30 | VAN Series | WET-CHEMICAL TREATMENT EQUIPMENT | CN | ZL 2017 2 0139360.9 |
| 31 | VAN Series | WET-CHEMICAL TREATMENT EQUIPMENT | TW | M543459 |
| 32 | VAN Series | BATCH SUBSTRATE DRYING EQUIPMENT AND SUBSTRATE DRYING AIR BLADE DEVICE THEREOF | TW | I694872 |
| 33 | VAN Series | BATCH SUBSTRATE DRYING EQUIPMENT AND SUBSTRATE DRYING AIR BLADE DEVICE THEREOF | CN | ZL 2019 2 0091948.0 |
| 34 | VAN Series | BATCH SUBSTRATE WET TREATMENT DEVICE AND BATCH SUBSTRATE WET TREATMENT METHOD | TW | I690991 |
| 35 | VAN Series | BATCH BASE PLATE WET PROCESSING UNIT | CN | ZL 2019 2 0111710.4 |
| 36 | VAN Series | CASSETTE ROTATING APPARATUS AND CASSETTE | TW | M584541 |
| 37 | VAN Series | CARTRIDGE ROTATING APPARATUS AND CARTRIDGE | CN | ZL 2019 2 1048377.9 |
| 38 | VAN Series | WAFER CLEANING AND DRYING DEVICE | CN | ZL 2019 2 1920014.X |
| 39 | VAN Series | WAFER CLEANING AND DRYING DEVICE | TW | M589363 |
| 40 | VAN Series | CHEMICAL AGENT QUANTITATIVE DEVICE | TW | M592958 |
| 41 | UFO Series | PUDDLE ETCHING METHOD OF THIN FILM BY USING SPIN-PROCESSOR | US | US 6,793,836 B2 |
| 42 | UFO Series | MECHANICAL STRUCTURE OF APPARATUS FOR CLAMPING WAFER WITH MULTIPLE GROUPS OF CLAMPING FINGERS |
TW | I295831 |
| 43 | UFO Series | SPIN CLEANING AND ETCHING WET PROCESSOR WITH DI BUBBLE RING DEVICE | TW | I383445 |
| 44 | UFO Series | EXHAUST APPARATUS FOR LIFTING AND LOWERING DRAIN TANK OF WET ETCHING DEVICE | TW | I383444 |
| 45 | UFO Series | EXHAUST APPARATUS FOR LIFTING AND LOWERING DRAIN TANK OF WET ETCHING DEVICE | CN | ZL 2012 1 0093743.9 |
| 46 | UFO Series | NOZZLE WITH AJUSTABLE ORIENTATION AND DIRECTION FOR TREATING THE BACKSIDE OF A WAFER | TW | I411025 |
| 47 | UFO Series | AUTOMATIC CLEANING METHOD FOR SPIN CLEANING AND ETCHING WET PROCESSOR | TW | I421928 |
| 48 | UFO Series | SINGLE WAFER WET PROCESS DEVICE WITH BERTICAL BATH IMMERSION PROCESS | TW | M497848 |
| 49 | UFO Series | DRYING METHOD OF CHIP STACKED STRUCTURE AND SYSTEM THEREOF | TW | I527143 |
| 50 | UFO Series | CLEANING APPARATUS | TW | M475692 |
| 51 | UFO Series | CLEANING METHOD OF CHIP STACKED STRUCTURE AND CLEANING APPARATUS | TW | I539515 |
| 52 | UFO Series | CLEANING METHOD OF CHIP STACKED STRUCTURE AND CLEANING APPARATUS | CN | ZL 2013 2 0739198.6 |
| 53 | UFO Series | WAFER BROKEN DETECTION | TW | M491942 |
| 54 | UFO Series | WAFER BROKEN DETECTION | CN | ZL 2014 2 0468448.1 |
| 55 | UFO Series | SUBSTRATE CLEANING DEVICE | TW | M504259 |
| 56 | UFO Series | SUBSTRATE CLEANING DEVICE | CN | ZL 2015 2 0285782.8 |
| 57 | UFO Series | LIQUID COLLECTION APPARATUS FOR SPIN ETCHER | CN | ZL 2015 1 0783139.2 |
| 58 | UFO Series | LIQUID COLLECTION APPARATUS FOR SPIN ETCHER | TW | M522779 |
| 59 | UFO Series | LIQUID COLLECTION APPARATUS FOR SPIN ETCHER | TW | I559990 |
| 60 | UFO Series | DEVICE FOR WET TREATMENT OF SINGLE WAFER | TW | I582886 |
| 61 | UFO Series | DEVICE FOR SUBSTRATE WET TREATMENT AND DEVICE FOR ETCHING AND CLEANING SINGLE WAFER COMPRISING THE SAME |
CN | ZL 2016 1 0051632.X |
| 62 | UFO Series | DEVICE FOR SUBSTRATE WET TREATMENT AND DEVICE FOR ETCHING AND CLEANING SINGLE WAFER COMPRISING THE SAME |
TW | I580487 |
| 63 | UFO Series | METHOD AND DEVICE OF SUPPLYING PROCESS LIQUID | TW | I633939 |
| 64 | UFO Series | SUBSTRATE PRESSING APPARATUS | CN | ZL 2016 2 0517382.X |
| 65 | UFO Series | SUBSTRATE PRESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING METHOD USING THE SAME | TW | I601236 |
| 66 | UFO Series | SUBSTRATE PROCESSING APPARATUS, SPRAY HEAD CLEAING DEVICE AND METHOD FOR CLEANING SPRAY HEAD |
TW | I640369 |
| 67 | UFO Series | SUBSTRATE PROCESSING APPARATUS AND SPRAY HEAD CLEANING DEVICE | TW | M548887 |
| 68 | UFO Series | SUBSTRATE BOARD TREATMENT AND SPRAY HEAD CLEANING | CN | ZL 2017 2 0599967.5 |
| 69 | UFO Series | WAFER CLEANING EQUIPMENT AND METHOD OF CONTROLLING A BRUSH OF THE WAFER CLEANING EQUIPMENT |
TW | I645467 |
| 70 | UFO Series | WAFER CLEANING EQUIPMENT | TW | M562488 |
| 71 | UFO Series | WAFER CLEANING EQUIPMENT | CN | ZL 2017 2 1788225.3 |
| 72 | UFO Series | SUBSTRATE PROCESSING APPARATUS AND ROTATING STAGE THEREOF | TW | I685045 |
| 73 | UFO Series | SUBSTRATE PROCESSING APPARATUS AND ROTATING STAGE THEREOF | CN | ZL 2018 2 0038609.1 |
| 74 | UFO Series | SUBSTRATE PROCESSING APPARATUS | TW | I650828 |
| 75 | UFO Series | SUBSTRATE PROCESSING APPARATUS | CN | ZL 2018 2 0037879.0 |
| 76 | UFO Series | CLEANING DEVICE | CN | ZL 2018 2 0692842.1 |
| 77 | UFO Series | CLEANING APPARATUS AND METHOD | TW | I667081 |
| 78 | UFO Series | WAFER FIXING DEVICE, WAFER FIXING BASE AND WAFER VACUUM CHUCK | TW | I642138 |
| 79 | UFO Series | WAFER MOUNTING APPARATUS, WAFER FIXED PEDESTAL AND WAFER VACUUM SUCKER | CN | ZL 2018 2 0319204.5 |
| 80 | UFO Series | CLEANING APPARATUS AND METHOD | TW | I673789 |
| 81 | UFO Series | CLEANING APPARATUS | CN | ZL 2018 2 193104.3 |
| 82 | UFO Series | SINGLE WAFER WET PROCESSING APPARATUS | TW | M582233 |
| 83 | UFO Series | SINGLE WAFER WET PROCESSING APPARATUS | CN | ZL 2019 2 0637940.X |
| 84 | UFO Series | SUBSTRATE TRANSFERRING APPARATUS AND SEMICONDUCTOR PROCESS MACHINE | CN | ZL 2019 2 0981884.1 |
| 85 | UFO Series | SUBSTRATE TRANSFERRING APPARATUS AND SEMICONDUCTOR PROCESS MACHINE | TW | M585428 |
| 86 | UFO Series | WAFER WET PROCESSING STATION | TW | M589894 |
| 87 | UFO Series | SUBSTRATE WET PROCESSING APPARATUS AND RECYCLE RING | TW | M596133 |